Study on DC-Contact MEMS Switches

摘要

This paper presents the design, fabrication and performance of a metal-to-metal contact shunt micro-electro-mechanical (MEMS) switch. The switch was composed of a fixed-fixed Al_(0.96)Si_(0.04) alloy beam with two pull-down electrodes and a central de-contact area. The switch was placed in an in-line configuration in a coplanar waveguide transmission line. The best RF performance shows insertion loss of less than 0.3dB and isolation of greater than 35dB for all frequencies up to 10 GHz.