In Situ Sensors for CIGS Deposition and Manufacture

摘要

In situ sensors are an important tool for process control, optimization, and documentation, both in the laboratory and industrial environments. Their further application to deposition of CuIn_xGa_(1-x)Se_2 (CIGS) for photovoltaics is particularly important, as record device efficiencies produced in the laboratory have yet to be replicated in manufacturing. This paper provides an overview of the current state of the art of in situ diagnostics for devices based on co-evaporated CIGS.