ENERGY DISPERSIVE X-RAY SPECTROMETRY WITH THE TRANSITION EDGE SENSOR MICROCALORIMETER: A REVOLUTIONARY ADVANCE IN MATERIALS MICROANALYSIS

摘要

The NIST microcalorimeter energy dispersive x-ray spectrometer provides important advances in x-ray spectrometry. The high spectral resolution, approaching 2 eV for photon energies below 2 keV, the wide photon energy coverage, 250 eV to 10 keV, and the energy dispersive operation enable a wide range of materials characterization problems to be addressed. This performance is especially critical to high spatial resolution, low-voltage x-ray microanalysis performed with the field-emission gun scanning electron microscope.