首页> 外文会议>Symposium on Defects and Diffusion in Silicon Processing April 1-4, 1997, San Francisco, California, U.S.A >Lattic disorder effects on the vacancy-oxygen centre in ion-irradiated silicon
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Lattic disorder effects on the vacancy-oxygen centre in ion-irradiated silicon

机译:晶格紊乱对离子辐照硅中空位氧中心的影响

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摘要

The Vacancy-Oxygen (VO) centre is one of the most prominent defects appearing in silicon after irradiation with energetic particles and gamma rays. It is formed when migrating vacancies are trapped by interstitial oxygen atoms. It gives rise to a deep level in the upper part of the silicon handgap at 0.164 eV below the conduction band edge that can be conveniently studied by deep level transient spectroscopy (DLTS). It is furthermore a very important defect from a technological point of view since it normally controls the charge carrier lifetimes in silicon power devices at high injection levels.
机译:空缺氧(VO)中心是高能粒子和伽马射线辐照后在硅中出现的最突出的缺陷之一。当迁移空位被间隙氧原子俘获时形成。它在导带边缘以下0.164 eV处的硅手隙上部产生了一个深能级,可以通过深能级瞬态光谱法(DLTS)方便地进行研究。从技术的角度来看,这是一个非常重要的缺陷,因为它通常会在高注入水平下控制硅功率器件中的载流子寿命。

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