首页> 外文会议>Symposia on Materials Issues and Modeling for Device Nanofabrication held November 29-December 2,1999,Boston,Masschusetts,U.S.A. >Real-time observation of Pt-Si micro-droplet micration by photo-electron emission microscope
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Real-time observation of Pt-Si micro-droplet micration by photo-electron emission microscope

机译:光电子发射显微镜实时观察Pt-Si微滴的微细化

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The formation and dynamics of Pt-Si liquid droplets on Si (001) substrates have been investigated by Photo-electron Emission Microscopy (PEEM). After ambient deposition of a 10nm Pt film, a uniform PtSi layer was transformed into an island structure at approx 800 deg C. The PtSi islands of micrometer size began to melt and were transformed into molten Pt-Si alloy islands below the melting point of PtSi. At approx 1100 deg C surface migration of the micro-droplets was observed. The moving droplets coalesced with nearby islands and grew in size. The motion was related to the temperature difference across the substrate, and droplet migration was observed from the cold to the hot regions of the surface. The migration velocity was measured as a function of temperature and droplet size. The driving force for migration is related to material diffusion, equilibrium at the solid-liquid interfaces, and surface energetics.
机译:Si(001)衬底上的Pt-Si液滴的形成和动力学已经通过光电子发射显微镜(PEEM)进行了研究。在室温下沉积10nm Pt膜后,均匀的PtSi层在约800摄氏度时转变为岛状结构。微米级的PtSi岛开始熔化,并转变为熔点低于PtSi的熔融Pt-Si合金岛。 。在约1100℃下观察到微滴的表面迁移。移动的水滴与附近的小岛聚结在一起并扩大了大小。该运动与整个基板上的温度差有关,并且观察到液滴从表面的冷区域向热区域迁移。测量迁移速度与温度和液滴尺寸的关系。迁移的驱动力与材料扩散,固液界面处的平衡以及表面能有关。

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