Reliability Based Robust Design of a Vibratory Micro Gyroscope

摘要

This paper presents a reliability based robust optimization method for design of micro gyroscopes considering fabrication errors. The difference of both sensing and driving natural frequencies is minimized as an objective function and the mode tracing constraints are introduced in a deterministic optimization problem. To ensure the robustness of objective function we propose a cost function bounding the performance and a constraint limiting the performance variation. The proposed robust optimization method has a feature that the mean value and the variation of the performance function are controlled at the same time and the second order sensitivity information is not required in the gradient-based optimization process. The standard deviation of the objective function decreased significantly comparing with those of the deterministic optimum while keeping the mean value at a similar level.