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Structural design for improving the sensitivity of a surface-micromachined vibratory gyroscope
Structural design for improving the sensitivity of a surface-micromachined vibratory gyroscope
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机译:用于提高表面微机械振动陀螺仪灵敏度的结构设计
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摘要
The present invention is a motion sensor apparatus for use as a general mechanical amplifier, a gyroscope, or other resonant sensor such as an accelerometer. In accordance with the invention, the motion sensor apparatus includes a primary mass and a primary flexure structure. The primary flexure structure supports the primary mass to experience driven motion against a bias of the primary flexure structure. The apparatus further includes a secondary mass which is less massive than the primary mass. A secondary flexure structure interconnects the secondary mass with the primary mass, and supports the secondary mass to experience sensing motion relative to the primary mass against a bias of the secondary flexure structure. The stiffness ratio between the primary and secondary flexure structures is equal to the mass ratio between the primary and secondary masses.
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