CMOS chip chemical detection system comprising mass-sensitive nanocantilevers

摘要

An attempt has been made to design a CMOS single-chip chemical detection system for integrating nanocantilevers with low power readout electronic circuits for the detection of traces (few molecules) of hydrocarbon-based gases in the environment. The design is divided into two following building blocks: nanocantilevers as chemical sensors and readout electronics. Carbon nanotubes (CNT)-based cantilevers have been chosen for high-sensitivity chemical sensing for on-chip integration with the interface electronics. An experimental technique is presented for the fabrication of CNT cantilever beams. Design of a readout interface electronics using a switched capacitor technique is presented in 0.5 μm n-well CMOS process for integrating CNT cantilever sensors.