Micromachined sensor systems on a chip: The integration of MEMS with CMOS and its applications

摘要

The monolithic integration of micromechanical devices with their controlling electronics offers potential increases in performance as well as decreased cost for these devices. Analog Devices has demonstrated the commercial viability of this integration by interleaving micromechanical fabrication steps with microelectronic fabrication steps to produce a single-axis accelerometer on a chip. A next-generation integrated technology developed at Sandia National Laboratories eliminates many of the constraints associated with Analog's process. This new technology enables the manufacture of complex micromachined sensor systems on a chip. An overview of Sandia's micromachined system-on-a-chip technology along with application of the technology to inertial sensor systems designed by researchers at U.C. Berkeley will be given.