DIRECT GROWTH OF DIAMOND COMPONENTS

摘要

Diverse surface microstructures on diamond films were grown by transfer molding technique using patterned templates removed after the diamond deposition process in a microwave plasma and a DC plasma CVD reactors. Si substrates with patterns formed by anisotropic etching or by RIE, porous Si and silica substrates were used as the templates. Two-dimensional arrays of diamond pyramids of a few microns size, and random diamond columns of～1 μm diameter have been produced and showed antireflective properties in IR optical range. Those tips also exhibited good field emission properties. Other shapes obtained are diamond gratings, arrays of pits with vertical side-walls, and microspheres. 3-D structures were formed by diamond infiltration into voids in synthetic porous opals, to obtain a photonic crystal - diamond "inverse opal".