Arch-type microcantilever as uncooled infrared detectors

摘要

A novel arch-type microcantilever has been developed as an uncooled infrared (IR) detector. The patented design uses the bimorph effect for mechanical deflection when exposed to infrared radiation. The so called arch-type enables greater deflections at high resonance frequencies. Materials used for the bimorph are amorphous Si with SiNy and Al, for the IR absorption polymers and TiN. First results have shown a noise equivalent temperature difference (NETD) of <20mK with optical readout. Alternatively capacitance and piezoresistive readout can be used.