首页> 外文会议>International Semiconductor Device Research Symposium;ISDRS '09 >Time- resolved photoluminescence studies of Al0.72Ga0.28N films with incommensurate chemical ordering
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Time- resolved photoluminescence studies of Al0.72Ga0.28N films with incommensurate chemical ordering

机译:Al 0.72 Ga 0.28 N薄膜的时间分辨光致发光研究,其化学排序不适当

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An important topic in the understanding of AlGaN alloys for deep ultraviolet emitters is the role of carrier localization on radiative lifetime and emission efficiency. Electron and hole wavefunction overlap, and therefore radiative lifetime and recombination efficiency, can be strongly influenced by the degree and nature of chemical ordering in the AlGaN alloy, with spatially indirect, type II-like transitions predicted to occur between electrons in ordered alloy regions and holes in random alloy regions for Al contents in the 40% to 90% range [1]. In this paper, we study the photoluminescence (PL) lifetimes in AlGaN alloys with incommensurate chemical ordering. AlGaN films were grown by RF plasma-assisted MBE under different kinetic conditions. The compositions in all films were maintained at a constant value of 72 % AlN mole fraction by using the same Al flux, while the kinetics of growth were controlled by varying the Ga flux and thus the III / V flux ratio during deposition of the various films, with some of the films grown under Ga-rich conditions and others under N-rich conditions. The structure of these films was previously investigated by XRD using synchrotron radiation and by SED-TEM [2]. These spectra show that the characteristic (0002) diffraction is identical in all samples, from which the composition of the films was inferred. However, in addition to the (0002) diffractions all samples show additional superlattice peaks indicative of atomic ordering. Specifically, the analysis of the diffraction data indicates that the films grown under N-rich conditions have a superlattice structure consistent with 4 MLs periodicity, while those grown under III /V ~1 or III /V > 1 (Ga-rich conditions) have a superlattice structure with a repeat distance that has no clear relationship with the crystal lattice (incommensurate ordering). This type of chemical ordering was attributed to a change of the growth mode from vapor phase to liquid phase epitaxy a-ns the Ga flux increases [3]. The latter growth mode leads to compositional inhomogeneities and thus potential fluctuations in the band structure of the films.
机译:了解用于深紫外发射器的AlGaN合金的一个重要主题是载流子局部化对辐射寿命和发射效率的作用。电子和空穴波的功能重叠,因此辐射寿命和复合效率会受到AlGaN合金中化学有序化程度和性质的强烈影响,预计在有序合金区域和电子之间会发生空间间接的类II型跃迁。 Al含量在40%至90%范围内的合金区域内的孔[1]。在本文中,我们研究了化学序数不相称的AlGaN合金的光致发光(PL)寿命。在不同的动力学条件下,通过射频等离子体辅助的MBE生长AlGaN膜。通过使用相同的Al助熔剂,所有膜中的成分均保持在72%AlN摩尔分数的恒定值,同时通过改变Ga助熔剂并因此改变各种膜的沉积过程中的III / V助熔剂比率来控制生长动力学。 ,其中一些薄膜是在富含Ga的条件下生长的,而另一些则是在富含N的条件下生长的。这些膜的结构先前已通过使用同步加速器辐射的XRD和SED-TEM进行了研究[2]。这些光谱表明,在所有样品中特征(0002)衍射都是相同的,由此可以推断出膜的组成。但是,除(0002)衍射外,所有样品均显示出额外的超晶格峰,表明原子有序。具体而言,对衍射数据的分析表明,在富氮条件下生长的膜具有与4 MLs周期一致的超晶格结构,而在III / V〜1或III / V> 1(富Ga条件下)生长的膜具有重复距离与晶格没有明确关系的超晶格结构(不规则排列)。这种化学有序性归因于生长模式从气相到液相外延a-ns的变化,Ga通量增加[3]。后者的生长模式导致成分不均匀,从而导致薄膜带结构的潜在波动。

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