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On the mechanisms of target modification by ion beams and laser pulses

机译:关于离子束和激光脉冲对目标的修饰机理

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摘要

A comparison is made between the importance of the following categories of processes in ion-surface and laser-surface interactions: ballistic, thermal-spike, residual-defect-induced, and electronic. It is shown that ballistic processes are important for ion sputtering, ion mixing, and ion composition change. Also, they exist with laser-pulse sputtering but are not important. The picture with thermal-spike processes is the inverse, such processes being unimportant in most ion-surface interactions, but very important indeed with laser-pulse sputtering. In the latter case one must distinguish between normal vaporization and phase explosion, both of which are fundamental. On the other hand, normal boiling may possibly be unimportant owing to the negligible density of heterogeneous nuclei formed in the bulk, approx 10~6 kg~-1. However, it is essential to note that, if nuclei can be formed at the surface, the density will be much higher. Sputtering due to subsurface heating probably does not exist. Residual defects are basic to all ion-surface interactions, but most especially to ion mixing. Here most (approx 90
机译:在离子-表面和激光-表面相互作用中以下过程的重要性之间进行了比较:弹道,热尖峰,残余缺陷诱发的和电子的。结果表明,弹道过程对于离子溅射,离子混合和离子组成变化很重要。而且,它们与激光脉冲溅射一起存在,但并不重要。具有热峰值过程的情况是相反的,这种过程在大多数离子-表面相互作用中并不重要,但对于激光脉冲溅射而言确实非常重要。在后一种情况下,必须区分正常汽化和相爆炸,两者都是基本的。另一方面,由于在本体中形成的异质核的密度可以忽略不计,大约10〜6 kg〜-1,因此正常沸腾可能并不重要。但是,必须注意的是,如果可以在表面形成核,则密度将更高。由于地下加热而引起的溅射可能不存在。残留缺陷是所有离子-表面相互作用的基础,但最重要的是离子混合。这里最多(约90

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