A Micro Optical Electromechanical System (MOEMS) for high precision displacement sensor design using ring resonator array

摘要

An efficient method for high precision displacement measurement based on micro scale ring resonator and MOEMS is presented. The proposed structure can be used as discrete and integrated sensor in engineering applications. Photo-elastic effect is used to convert the physical displacement to the index of refraction variation in the ring resonator array. Analytical relation for description of system transfer function is derived. Single and multiple ring resonators are examined for increase of the system sensitivity. It is shown that an array of multiple ring resonators (array) is better than single ring case. Effects of optical and geometrical parameters of the proposed structure on sensitivity are studied.