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Study on infrared optical switching of vanadium dioxide thin film

机译:二氧化钒薄膜的红外光开关研究

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摘要

Dispersion theory for refractive index and extinction coefficient of vanadium dioxide thin film is studied, and its temperature-dependence dispersion formula of optical constants is presented by numerical fitting with Sellmeier dispersion model. The optical transmittance and reflectance at different temperature and wavelength is calculated using film matrix theory. Vanadium dioxide thin films with different thickness are deposited by magnetron sputtering on glass, sapphire and silicon dioxide substrates, and the optical transmittance and reflectivity of the films are measured, and the experiment curve agrees well with that of simulation.
机译:研究了二氧化钒薄膜的折射率和消光系数的色散理论,通过与Sellmeier色散模型的数值拟合,给出了其光常数随温度变化的色散公式。利用膜矩阵理论计算了不同温度和波长下的透光率和反射率。通过磁控溅射在玻璃,蓝宝石和二氧化硅衬底上沉积不同厚度的二氧化钒薄膜,并测量了薄膜的透光率和反射率,实验曲线与模拟结果吻合良好。

著录项

  • 来源
    《Optoelectronic devices and integration 》|2009年|P.75090P.1-75090P.8|共8页
  • 会议地点 Shanghai(CN);Shanghai(CN)
  • 作者单位

    School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai, China 200093;

    School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai, China 200093 Shanghai Key Laboratory of Modern Optical Systems, Shanghai, China 200093;

    School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai, China 200093;

    School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai, China 200093 Institute of Thin Films and Nanomaterials, Wuyi University, Jiangmen, Guangdong, China 529020;

    School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai,;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 光学仪器 ;
  • 关键词

    vanadium dioxide; optical constants; infrared optical properties; numerical fitting; magnetron sputtering;

    机译:二氧化钒光学常数红外光学性能数值拟合磁控溅射;

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