Macronix International Co., Ltd., Technology Development Center, No. 16, Li-Hsin Rd., Science Park, Hsinchu 300, Taiwan;
Macronix International Co., Ltd., Technology Development Center, No. 16, Li-Hsin Rd., Science Park, Hsinchu 300, Taiwan;
Macronix International Co., Ltd., Technology Development Center, No. 16, Li-Hsin Rd., Science Park, Hsinchu 300, Taiwan;
Macronix International Co., Ltd., Technology Development Center, No. 16, Li-Hsin Rd., Science Park, Hsinchu 300, Taiwan;
Macronix International Co., Ltd., Technology Development Center, No. 16, Li-Hsin Rd., Science Park, Hsinchu 300, Taiwan;
Macronix International Co., Ltd., Technology Development Center, No. 16, Li-Hsin Rd., Science Park, Hsinchu 300, Taiwan;
Macronix International Co., Ltd., Technology Development Center, No. 16, Li-Hsin Rd., Science Park, Hsinchu 300, Taiwan;
OPC; PWOPC; multiple-step PWOPC; CD tolerance; process window;
机译:ELIAD:具有紧凑和宏OPC后可印刷性预测的高效光刻意识详细路由算法
机译:通过可重新配置的OPC优化过程窗口的鲁棒性
机译:超标量处理器中可感知MLP的动态指令窗口大小调整,可自适应地利用可用的并行性
机译:多步过程窗口感知OPC for Hyper-Na光刻
机译:过程利用率和类似问题解决经验对解决复杂的多步骤问题的影响
机译:弗林蛋白酶内蛋白酶的激活是一个多步骤过程:酸化和内部前肽裂解的要求。
机译:工艺窗口OPC验证:65 nm节点的干法与浸没式光刻