4H-SiC Schottky photodiodes for ultraviolet light detection

摘要

In recent years Silicon Carbide (SiC) photodiodes have been proposed for ultraviolet (UV) light detection because of their robustness even in harsh environments, high quantum efficiency in all the UV range (200 nm–400 nm), excellent visible blindness, low dark current and high speed. Here, we report on the electro-optical performances and use in application of high signal-to noise ratio low reverse biased 4H-SiC vertical Schottky photodiodes based on the pinch-off surface effect, obtained by means of self-aligned Nickel Silicide (Ni