Schottky Barrier Detection Devices Having a 4H-SiC n-Type Epitaxial Layer

摘要

A detection device, along with methods of its manufacture and use, is provided. The detection device can include: a SiC substrate defining a substrate surface cut from planar to about 12°; a buffer epitaxial layer on the substrate surface; a n-type epitaxial layer on the buffer epitaxial layer; and a top contact on the n-type epitaxial layer. The buffer epitaxial layer can include a n-type 4H—SiC epitaxial layer doped at a concentration of about 1×10¹⁵ cm⁻³ to about 5×10¹⁸ cm⁻³ with nitrogen, boron, aluminum, or a mixture thereof. The n-type epitaxial layer can include a n-type 4H—SiC epitaxial layer doped at a concentration of about 1×10¹³ cm⁻³ to about 5×10¹⁵ cm⁻³ with nitrogen. The top contact can have a thickness of about 8 nm to about 15 nm.