Piezoelectricity of ZnO nano-rods array prepared by hydrothermal method

摘要

In this works, the piezoelectric devices of ZnO nano-rods were fabricated for piezoelectric sensor. The ZnO nano-rods were grown by hydrothermal synthesis through two-dimensional nano-patterns using a laser interference lithography. ZnO nano-rods were preferred orientation with c-axis and wurtzite structure. It was found that the electricity of nano-rod piezoelectric device was 8×10~(-7) Wh under the load of 0.8kgf. The piezoelectric behaviors are attributed to the direct compression of ZnO nano-rods by an external force. Therefore, the piezoelectric devices of ZnO nano-rods fabricated by hydrothermal methods were applicable to the pressure sensors.