Prevention of Coalescence Stage from Nuclei at Initial Growth of Thin Film by Substrate Rotation in Physical-Vapor Deposition

摘要

Metal nanoparticles were fabricated on the powdery materials by a simple and unique method in which the kinetics of island growth at initial states of thin film in physical-vapor deposition (PVD) and the stirring of powders in a vessel were used. The stirring of powders in vacuum deposition prevented the metal islands from coalescing together and changing into thin film on the surfaces of powders, resulting in the formation of nanosized particles having the island size. The material properties of nanoparticles on the powders were characterized by various techniques and possible industrial applications were discussed.