Effect of wet etching parameter to the diameter and length of silicon nanowires

摘要

A wet etching method for preparing silicon nanowires on silicon substrates at near room temperature is presented. The effect of experiment parameter to the silver nanoparticle forming including concentration of AgNO3,immersing time and solution temperature, and the effect of etching time to the length of silicon nanowires are investigated. It is concluded that solution temperature has more impact on diameter of silicon nanowires than concentration of AgNO3 and immersing time and longer etching time may result in longer silicon nanowires.