State Key Laboratory of Precision Measurement Technology and Instruments,Department of Precision Instruments and Mechanology,Tsinghua University,Beijing 100084,China;
Department of Measurement-Control Technology and Instruments,Information Engineering ,University of Science Technology Beijing,Beijing,100083,China;
State Key Laboratory of Precision Measurement Technology and Instruments,Department of Precision Instruments and Mechanology,Tsinghua University,Beijing 100084,China;
Department of Measurement-Control Technology and Instruments,Information Engineering ,University of Science Technology Beijing ,Beijing,100083,China;
micro-manipulation:piezoelectric transducer:resonant frequency:frequency tracking:DDS;
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