Wide band study of silicon-on-insulator photodiodes on suspended micro-hotplates platforms

摘要

In this paper, the performances of a lateral thin-film PIN photodiode based on silicon-on-insulator technology are reported for applications from blue to red wavelengths. The platform consists of a micro-hotplate with a suspended heater and a photodiode. Responsivities of 0.01 to 0.05 A/W were obtained for 450-900 nm light range in reverse bias operation. Suspended photodiodes give up to 5x responsivity improvement with regard to the photodiodes on substrate. In addition to photodetection, the diode can monitor the temperature with a linear voltage decreasing by about 1.4 mV/K, under 50 μA constant forward current for a large range of temperature (measured from 25 to 300°C).