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Nonlinear behaviour of a micromachined SOI device for energy harvesting application

机译:微机械加工应用的微机械SOI装置的非线性行为

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This paper reports a novel nonlinear MEMS mechanism for energy harvesting applications based on vibrating source. The typical mechanism to harvest energy is based on resonance mechanical bodies (linear systems) that enable collecting energy through self-generating materials and tuned close to the resonance spike. Moreover, it must be observed that in the vast majority of cases the ambient mechanical vibrations come in a vast variety of forms and having the energy distributed over a wide spectrum of frequencies. For this reason the novel approach proposed concerns a nonlinear vibrating system based on a switching mechanism around two stable states. A wider spectrum is predicted for these nonlinear oscillators, so more energy can be saved adopting a bistable dynamic. An U-shaped BESOI (Back Etched SOI) cantilever has been designed and simulated and an experimental campaign validates the principle.
机译:本文报告了基于振动源的能量收集应用的新型非线性MEMS机制。 收获能量的典型机制基于谐振机械体(线性系统),其能够通过自成的材料收集能量并接近谐振尖峰。 此外,必须观察到,在绝大多数情况下,环境机械振动以各种形式具有多种形式,并且能量分布在宽频谱范围内。 因此,新颖的方法提出了基于两个稳定状态的切换机制的非线性振动系统。 预测这些非线性振荡器的更广泛的频谱,因此可以节省更多的能量采用双稳态动态。 设计和模拟U形BESOI(后蚀刻SOI)悬臂,实验活动验证了原理。

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