Methods for the Integration of New Architectural Nanostructures with MEMS Systems for Sensors and Harvester Devices

摘要

This work is addressing the development of new, improved piezomaterials and devices with the goal to build high efficiency energy microharvesters as alternative sources of sustainable energy, and resonant piezo sensors for bio and chemical sensing. Integration of piezolayers in MEMS devices is the key issue of the successful harvester and sensors fabrication. An integrable piezomaterial appeared as a stringent need of our days in answering the environmental problems such as climate change, having as consequence the need to decrease the non-renewable fuels consumption.