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Effect of the Porosity of PZT Thick Films on Mass Sensitivity and Resonance Force for Cantilever Type Bio Sensors

机译:PZT厚膜孔隙率对悬臂型生物传感器的质量敏感性和谐振力的影响

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摘要

PZT thick films fabricated through the screen printing show a porosity ranging from 20% to 40%. Unfortunately, these high porosities of thick films greatly affect electromechanical characteristics of PZT thick film cantilevers. In this paper, we report a systematic analysis regarding the effect of the thick film porosity on the electromechanical characteristics of the PZT thick film cantilever. PZT (Pb(Zr0.52Ti0.48)O3) thick film cantilever devices were successfully fabricated on a Pt/Ti02/SiNx/Si substrate using a screen printing method and MEMS processes. Theoretical calculations of mass sensitivity and actuating force of PZT thick film cantilevers are presented with respect to material properties (density and Young's modulus) and geometry (length, width, and thickness) of PZT thick films, which are dependent on experimentally verified material and geometrical parameters. From the result of modeling, it is confirmed that the increase of Young's modulus due to the decrease of porosity of PZT thick films is more efficient than the control of the cantilever geometry, for increasing the cantilever resonating force. On the other hand, the optimization of geometric constituents is more effective than the control of densification of PZT thick films, for increasing the cantilever sensitivity.
机译:通过丝网印刷制造的PZT厚膜显示孔隙率范围为20%至40%。不幸的是,这些厚膜的这些高孔隙性极大地影响了PZT厚膜悬臂的机电特性。在本文中,我们报告了关于厚膜孔隙率对PZT厚膜悬臂的机电特性的影响的系统分析。 PZT(PB(Zr 0 52 ti 0 48 )O 3 )使用丝网印刷方法和MEMS工艺成功地在Pt / Ti 02 / SiNx / SiNx / SiNx / SiNx / SiNX / Si衬底上成功制造厚膜悬臂装置。 PZT厚膜悬臂的质量敏感性和致动力的理论计算相对于PZT厚膜的材料性质(密度和杨氏模量)和几何(长度,宽度,厚度,厚度)呈现,这取决于实验验证的材料和几何参数。从建模的结果,证实,由于PZT厚膜的孔隙率降低,杨氏模量的增加比悬臂几何形状的控制更有效,以增加悬臂谐振力。另一方面,几何成分的优化比PZT厚膜的致密化更有效,用于增加悬臂灵敏度。

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