Hydrogen is an attractive energy medium. Development of an efficient hydrogen production method is important for the future energy system. Preparation of a hydrogen permselective membrane for high temperature application is one of the key techniques for an efficient hydrogen production. Recently, a stable silica membrane was prepared by the counter diffusion chemical vapor deposition (CVD) method where two kinds of reactants are supplied from the opposite side of the porous substrates. In this study, recent developments of silica membranes prepared by the counter diffusion CVD method were reported. Effects of pore size of γ-alumina substrates and effects of deposition temperatures were discussed.
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