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Synthesis and Spectroellipsometric Characterization of Y_2O_3-stabilized ZrO_2-Au Nanocomposite Films for Smart Sensor Applications

机译:用于智能传感器应用的Y_2O_3稳定的Zro_2-Au纳米复合膜的合成与光谱轴表征

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Noble metal nanoparticles exhibit significant potential in all-optical, smart-sensing applications due to their unique optical properties. In particular, gold (Au) nanoparticles exhibit a strong surface plasmon resonance (SPR) band, the spectral position and shape of which depends on the size, shape, and density of the nanoparticles and the physical and chemical properties of surrounding environment. Embedding the nanoparticles in an yttria-stabilized zirconia (YSZ) matrix is believed to expand their range of operation to temperatures above 500°C. YSZ is a material that has been proven suitable for optical applications due to its high refractive index, low absorption coefficient and high transparency in the visible and infrared regions. Thus, its use as a base platform for nanocomposite thin films is expected to provide significant benefits in the development of harsh environment multifunctional sensors. In this work YSZ-Au nanocomposite films were synthesized from a YSZ and a Au target by the radio frequency magnetron co-sputtering technique in combination with a post-deposition annealing treatment in an argon atmosphere, with the annealing temperature being varied from 500-1000°C in steps of 100°C. The microstructure and the optical properties of the resulting films were characterized by x-ray diffraction spectroscopy, scanning electron microscopy and spectroscopic ellipsometry. Results on the effect of the Au particle size on the real and the imaginary part of the refractive index of the nanostructured composites are presented. Future smart sensor systems utilizing these multifunctional material sets for harsh environment sensing applications will likewise be outlined.
机译:由于其独特的光学性质,贵金属纳米颗粒在全光学,智能感测应用中表现出显着的潜力。特别地,金(Au)纳米颗粒表现出强表面等离子体共振(SPR)带,光谱位置和形状取决于纳米颗粒的尺寸,形状和密度以及周围环境的物理和化学性质。将纳米颗粒嵌入氧化钇稳定的氧化锆(YSZ)基质中,据信将其操作范围扩展到高于500℃的温度。 YSZ是由于其高折射率,低吸收系数和可见光区域的高透明度而被证明的材料。因此,它用作纳米复合薄膜的基础平台的用途,在苛刻的环境多功能传感器的开发中提供了显着的益处。在该作品中,通过射频磁控杂交溅射技术从YSZ和Au靶合成了YSZ-Au纳米复合膜,与氩气氛中的沉积后退火处理结合,退火温度从500-1000变化°C为100°C的步长。通过X射线衍射光谱,扫描电子显微镜和光谱椭圆形表征所得薄膜的微观结构和光学性质。结果提出了Au粒径对纳米结构复合材料的折射率的实验和虚部的效果。使用这些多功能材料组用于苛刻环境感测应用程序的未来智能传感器系统将概述。

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