Compact electrode design for in-plane accelerometer on SOI with refilled isolation trench

摘要

A two-axis in-plane capacitive accelerometer fabricated on silicon-on-insulator (SOI) is developed. With each stationary electrode separated to two sub stationary electrodes by refilled isolation trench, the presented accelerometer has compact differential capacitance electrodes to improve capacitance sensitivity per sensing area. In addition, the overlap area-changed capacitor enables good linearity and low damping coefficient.