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Ultrathin film deposition by pulsed laser ablation using crossed beams

机译:使用横梁脉冲激光烧蚀超薄膜沉积

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A high vacuum pulsed laser deposition system is described where an intersection of two ablation plumes from twinned simultaneously irradiated targets is used. This system allows thin film and multilayer deposition of a wide variety of materials (including low melting point metals like tin) practically without droplet contamination. The intersection region acts as a filter for droplets and high energy plasma particles. The use of twinned targets of different materials facilitates preparation of artificially mixed supersaturated thin film solid state solutions used as a media for sub-micrometer and nanometer-scale surface processing. Special design of the target holder that can carry simultaneously up to 24 targets and computer control of the deposition process make it possible to change easily targets without venting the deposition chamber and to deposit arbitrary multilayer combinations of various materials.
机译:描述了高真空脉冲激光沉积系统,其中使用来自孪晶同时照射靶的两个消融羽毛。 该系统实际上允许薄膜和多层沉积各种各样的材料(如锡等低熔点金属)而没有液滴污染。 交叉点区域充当液滴和高能等离子体颗粒的过滤器。 使用不同材料的孪晶靶的使用有助于制备作为亚微米和纳米级表面处理的介质的人工混合过饱和薄膜固态溶液。 可以同时携带的目标保持器的特殊设计最多24个目标和计算机控制的沉积过程使得可以在不通风沉积室的情况下容易地改变目标并且沉积各种材料的任意多层组合。

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