PULSE LASER DEPOSITION APPARATUS FOR SEGMENTED TARGET AND DEPOSITION METHOD FOR MULTILAYERED ULTRATHIN FILM USING SAME

摘要

The present invention relates to a pulse laser deposition apparatus including: a chamber in which a substrate and deposition materials are located, a target which is located in the chamber and rotates the deposition materials while supporting the deposition materials; and a laser generator for irradiating a portion of the target with laser so as to dissolve the deposition materials and to deposit a thin film on the substrate with the dissolved deposition materials, wherein the target supports two or more deposition materials while having physically segmented surfaces by the deposition materials, so that the deposition materials onto which the laser is irradiated are changed as the target rotates. According to the present invention, a multilayered ultrathin film having a predetermined cycle can be very precisely made by simple manipulation only.;COPYRIGHT KIPO 2014