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Analysis of Dendrite Images Formed by Electrochemical Migration in a Semiconductor Sensor

机译:半导体传感器电化学迁移形成的枝晶图像分析

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Dendrites were observed in the failure of semiconductor sensor devices. EDX analysis showed that the dendrites grown from bare sensor dice consisted of tin metal. The tin dendrites exhibited massive and dense branches. Dendrites grown from mechanically decapped parts consisted of silver. The silver dendrites exhibited delicate, lace-like structure. Binary and grey scale images of dendrites were analyzed for fractal dimension number and branch density. The tin dendrites had a higher, statistically significant branch density number than silver, due to tin's more intricate branching pattern. Fractal numbers can be used to differentiate between tin and silver dendrites, even in the absence of EDX analysis equipment.
机译:在半导体传感器装置的故障中观察到树突。 EDX分析表明,从裸露的传感器骰子生长的树枝状物由锡金属组成。锡树枝状物显示出大规模和致密的枝条。从机械斩波部件种植的树枝状体由银组成。银树枝状体表现出精细,蕾丝状的结构。分析分形尺寸数和分支密度的树突的二进制和灰度图像。由于TIN更复杂的分支图案,锡枝曲曲具有比银的更高,统计学显着的分支密度数。即使在没有EDX分析设备的情况下,即使在没有EDX分析设备的情况下,分形数可用于区分锡和银树枝状物。

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