Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to C_2H_6O and NO_2

摘要

Nanosensors systems comprised of an array of parallel-connected single-nanowires across electrodes with finger-widths, closely related to the diameter of gas sensitive WO_3 nanowire are developed. The processing steps for the fabrication of these systems include electron-beam lithography, direct writing laser lithography, metallization, etching, dielectrophoresis, and aerosol assisted chemical vapour deposition, among others. The functionality of these systems in resistive configuration towards ethanol and nitrogen dioxide is evaluated. Results indicate higher sensor responses at 250 °C and less signal to noise by applying constant currents of 50 nA. For these conditions, the sensor systems demonstrate reproducible responses to each analyte, with higher response to low concentrations of nitrogen dioxide (0.2, 1, 2.5 ppm), as opposed to ethanol (2.5, 10, 100 ppm), and in line with the literature.