基于集成参比电极的多参数水质监测微传感器阵列研制

摘要

An integrated raicroelectrode type sensor consisting of Ag/AgCl reference electrode for simultaneous measurement of temperature, conductivity and oxidation reduction potential ( ORP) is fabricated using micro-electro-mechanical systems( MEMS) technology and electrochemical modification method. The resistance and the temperature has a good linear relationship. The constant of the conductivity electrode is 2. 723, so this sensor can measure the general water conductivity. Compared with the slope of the commercial ORP instrument, the slope of the integrated ORP sensor(0.997 33) is close to the theoretical slope (1. 000 0) against quinhydrone calibration solutions.%研究了一种基于MEMS工艺制备的集成微电极型传感器,并用电化学修饰方法将Ag/AgCl参比电极集成在传感器上,用于水体中温度、电导率和氧化还原电位的测定.Pt温度传感器的电阻与温度的线性关系良好,满足温度测量精度的需求；比较法确定电导率传感器的电极常数为2.723,可以对一般水体的电导率进行测定；氧化还原电位传感器的标准曲线斜率为0.997 33接近于理论值,表明它可以准确表示水体的氧化还原电位值.