Effect of bilayer period on hardness and wear of Mo-N/Mo-O-N multilayer films

摘要

It has been reported that the hardness of multilayer coatings increases with reducing the bilayer period, resulting in the improvement of mechanical and tribological properties. We have reported that Mo-N/Mo-O-N multilayer film showed better wear properties than Mo-N and Mo-O-N single layer films. In this study, we investigated the hardness, friction and wear of Mo-N/Mo-O-N multilayer films with different bilayer periods.