Influence of the Bilayer Thickness of Nanostructured Multilayer MoN/CrN Coating on Its Microstructure, Hardness, and Elemental Composition

摘要

Multilayer nanostructured coatings consisting of alternating MoN and CrN layers were obtainedudby vacuum cathode evaporation under various conditions of deposition. The transition from micron sizes ofudbilayers to the nanometer scale in the coatings under investigation leads to an increase in hardness from 15 toud35.5 GPa (with a layer thickness of about 35 nm). At the same time, when the number of bilayers in the coat-uding decreases, the average Vickers hardness increases from 1267 HV0.05 to 3307 HV0.05. An increase in theudvalue of the potential supplied to the substrate from –20 to –150 V leads to the formation of growth texturesudin coating layers with the [100] axis, and to an increase in the intensity of reflections with increasing bilayerudthickness. Elemental analysis carried out with the help of Rutherford backscattering, secondary ion massudspectrometry and energy dispersion spectra showed a good separation of the MoN and CrN layers near theudsurface of the coatings.