AFM/SNOM cantilever probe serial fabrication process with controlled tip nanoaperture

摘要

In this paper we present the microfabrication steps of organo-mineral and polymer (SU8) based cantilever probe systems using an alternative batch front face fabrication process. The probes are consisting of cantilevers with pyramidal nanoengineered tips and waveguides integrated on an SU8 chip and coupled to a miniature photodetector. They can be used as a low-cost coupled AFM/SNOM sensor allowing both topographic and optical images in a same scan. Holders and cantilevers design can be easily adapted to cover a large range of actual AFM microscopes and applications.