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Patterning of thin film strain gauges on 3D-surfaces

机译:3D表面上薄膜应变仪的图案化

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Metal thin film strain gauges applied directly on the surface of components offer good long term stability even in harsh environments and at elevated temperatures. They consist of vacuum deposited isolation and sensing films. A direct-write laser patterning process based on picosecond laser pulses has been developed to overcome the restriction to 2D-surfaces caused by photolithographic patterning. We present results of tensile test of strain sensors patterned in v-notches milled in aluminum samples. The thermal coefficient of resistance (TCR) and the gauge factor are not affected by Laser patterning of conductor widths of 13 μm and larger. Therefore, the developed process is suitable to pattern miniaturized thin film strain gauges on 3D-surfaces. Due to the exploration of 3D-surfaces, the prerequisite for new sensing methods has been created to develop new applications which require the patterning of sensors on curved surfaces, such as bearings and shafts. The direct-write approach enables cost reductions for patterning of individualized products, such as medical implants.
机译:即使在恶劣的环境和高温下,金属薄膜应变仪也可直接施加在部件表面上的长期稳定性。它们包括真空沉积的隔离和传感薄膜。已经开发了一种基于PICOSECOND激光脉冲的直接写激光图案化过程,以克服由光刻图案化引起的2D-表面的限制。我们存在在铝样品中铣削中图案化的应变传感器的拉伸试验结果。电阻(TCR)的热量系数(TCR)和量因子不受电导宽度为13μm和更大的激光图案化的影响。因此,开发的方法适用于在3D表面上进行小型化薄膜应变计。由于3D表面的探索,已经创建了新的传感方法的先决条件来开发新的应用,该应用需要在弯曲表面上的传感器图案化,例如轴承和轴。直接写入方法能够降低用于图案化个性化产品,例如医疗植入物。

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