Near edge X-ray absorption fine structure study of Zn_(0.8)Mg_(0.2)O thin films

摘要

We report the local electronic structure study of Zn_(0.8)Mg_(0.2)O thin films using x-ray absorption spectroscopy. The films were deposited on p-Si (100) substrates by sol-gel method and then annealed in O_2 ambient for 1 hour. X-ray diffraction (XRD) confirmed the single phase wurtzite structure with a (002) preferred orientation. The near edge x-ray absorption fine structure (NEXAFS) spectrum collected at Ο K-edge indicates the presence of some oxygen vacancies in the film. The NEXAFS at Mg K-edge confirms the Mg doping into ZnO lattice. Zn L_3-edge spectra feature reflects no Zn defect related features.