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MEASURING DEVICE FOR FINE STRUCTURE OF EXTENDED X-RAY ABSORPTION EDGE

机译:扩展的X射线吸收边缘精细结构的测量装置

摘要

PURPOSE:To execute a measurement with a high accuracy by controlling a rotational angle of an X-ray reflecting mirror, and a sample position so that incident X-rays and an X-ray irradiating position to the reflecting mirror and the sample conform with a condition of a total reflection. CONSTITUTION:A rack base 13 is supported so as to be turnable through a yoke 13' by a revolving shaft which has been provided on a blanket 17, the rack base 13 is loaded with an X-ray slit 7, an incident X-ray detector 8, a sample chamber 9, and a sample transmission X-ray detector 12, and the rack base 13 is connected to an actuator 15 of a rack base 14. In this state, by turning the rack base 13 by the actuator 15, and controlling incident X-rays 2, and an X-ray irradiating position of an X-ray total reflecting mirror 6 and a sample 10 so as to conform with a condition of a total reflection, even if an energy of a fundamental wave of the X-rays 2 is below a prescribed value, its higher harmonics can be eliminated, and also scattered X-rays of a high energy and a fluorescent X-ray intensity can also be attenuated. Also, even if a fundamental wave energy of the X-rays 2 is varied by making the reflecting mirror 6 coincide with the revolving shaft of the rack base 13, the X-ray irradiating position on the sample 10 is not varied, therefore, the measurement can be executed with a high accuracy.
机译:目的:通过控制X射线反射镜的旋转角度和样品位置,使入射到X射线反射镜和样品的X射线以及X射线的照射位置与反射镜一致,以高精度进行测量。全反射的条件。构成:机架底座13被设置在橡皮布17上的旋转轴支撑成可通过轭架13'旋转。机架底座13上装有X射线狭缝7,入射X射线检测器8,样品室9和样品透射X射线检测器12,并且机架基座13连接到机架基座14的致动器15。在这种状态下,通过致动器15转动机架基座13,并控制入射X射线2,X射线全反射镜6和样品10的X射线照射位置,以使其即使全反射的基波能量为全反射条件也一样。 X射线2低于规定值,可以消除其高次谐波,并且还可以衰减高能量的散射X射线和荧光X射线强度。另外,即使通过使反射镜6与架子基座13的旋转轴一致来改变X射线2的基波能量,样品10上的X射线照射位置也不会变化。可以高精度地进行测量。

著录项

  • 公开/公告号JPS62159031A

    专利类型

  • 公开/公告日1987-07-15

    原文格式PDF

  • 申请/专利权人 HITACHI LTD;

    申请/专利号JP19860000233

  • 发明设计人 NAKANO ASAO;

    申请日1986-01-07

  • 分类号G01N23/06;G01N23/08;

  • 国家 JP

  • 入库时间 2022-08-22 07:27:16

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