首页> 外文会议>Symposium K on Functional Materials and Nanostructures for Chemical and Biochemical Sensing >When organometallic chemistry and metal oxide nanoparticles meet optimized silicon based gas sensor
【24h】

When organometallic chemistry and metal oxide nanoparticles meet optimized silicon based gas sensor

机译:当有机金属化学和金属氧化物纳米颗粒满足优化的硅基气体传感器时

获取原文

摘要

A robust silicon gas sensor chip (platinum heater, low stress membrane) has been designed and successfully operated with various metal oxide nanoparticles synthesized by organometallic route (SnO_2, ZnO) deposited by a generic ink-jet method. Micron thick layers made of nanostructured grains are obtained and the sensitivities under CO gas are presented.
机译:坚固的硅气体传感器芯片(铂加热器,低应力膜)设计并成功地与由通用喷墨方法沉积的有机金属途径(SnO_2,ZnO)合成的各种金属氧化物纳米颗粒操作。获得由纳米结构晶粒制成的微米厚层,并提出了CO气体的敏感性。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号