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Adhesion Improvement of CVD Diamond Coatings on WC-Co Substrates for Machining Applications

机译:加工应用WC-CO基材上CVD金刚石涂层的粘附性改进

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In order to improve the performance of WC-Co cutting tools, high quality microcrystalline diamond coatings were produced using microwave plasma enhanced chemical vapor deposition (MPECVD) method. The adhesion of the diamond film deposited on the substrate has been considered to play an important role in the performance of the cutting tools in machining applications. A thin layer of Cr was coated on the WC-Co substrate before the diamond deposition; 75 μm diamond powders were sandblasted on the surface at 40 Psi to increase the nucleation density. Diamond film has been successfully deposited on the substrate at temperature around 750°C with 1.5 % CH_4 in Hydrogen plasma. Scanning electron microscopy (SEM) has been used to study the surface morphology and Raman spectroscopy has been performed to characterize the quality of the diamond films and measure the residual stress. The adhesion of the diamond film has been evaluated by Rockwell indentation test. The results indicated that film grown on the Cr interlayer with diamond powder sandblasting has much better adhesion strength.
机译:为了提高WC-CO切削工具的性能,使用微波等离子体增强化学气相沉积(MPECVD)方法生产高质量的微晶金刚石涂层。已经认为沉积在基板上的金刚石膜的粘附在加工应用中的切削工具的性能中起着重要作用。在金刚石沉积之前,在WC-Co底物上涂覆薄的Cr层; 75μm金刚石粉末在40psi的表面上搅拌,以增加成核密度。金刚石薄膜已成功沉积在基板上,在750℃的温度下,氢等离子体中的1.5%CH_4。扫描电子显微镜(SEM)已被用于研究表面形态和拉曼光谱,以表征金刚石膜的质量并测量残余应力。罗克韦尔凹口试验评估了金刚石薄膜的粘附性。结果表明,用金刚石粉末喷砂在Cr中间层上生长的薄膜具有更好的粘合强度。

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