Crystal Orientation of Sol-Gel Piezoelectric PZT Films and Vibrating Energy Conversion Efficiency on MEMS Buckled Diaphragm Structures

摘要

Piezoelectric energy conversion efficiency of vibrating MEMS diaphragm structures stronglydepends on their static, built-in deection. In this work, sol-gel derived piezoelectric lead-zirconate-titanate (PZT) thin lms were investigated in their crystal orientation from the viewpoints offerroelectric property dominating piezoelectric effect and stress dominating the static deectionof the diaphragms. Purely (100) or (111) textured lms showed intermediate efficiencies, whereasmixed (100) and (111) oriented lms yielded an excellent efficiency of the piezoelectric responsesto ultrasound pulses.