Low dark current p-on-n technology for space applications

摘要

Space applications are requiring low dark current in the long wave infrared at low operating temperature for low flux observation. The applications envisioned with this type of specification are namely scientific and planetary missions. Within the framework of the joint laboratory between Sofradir and the CEA-LETI, a specific development of a TV format focal plane array with a cut-off wavelength of 12.5um at 40K has been carried out. For this application, the p on n technology has been used. It is based on an In doped HgCdTe absorbing material grown by Liquid Phase Epitaxy (LPE) and an As implanted junction area. This architecture allows decreasing both dark current and series resistance compared to the legacy n on p technology based on Hg vacancies. In this paper, the technological improvements are briefly described. These technological tunings led to a 35% decrease of dark current in the diffusion regime. CEA-LETI and Sofradir demonstrated the ability to use the p on n technology with a long cutoff wavelength in the infrared range.