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Physics of GaN High Electron Mobility Transistors

机译:GaN高电子迁移率晶体管的物理学

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摘要

The nitride High Electron Mobility (HEMTs) have a great potential for high power and RF applications because of a high breakdown field, a very large density of the polarization induced two-dimensional electrons, high electron velocities and mobilities, excellent thermal properties, chemical inertness, and radiation hardness. GaN power transistors grown on silicon substrates are already being commercialized. However, the full potential of the nitride based HEMTs is still to be achieved and will require improvements in the device design that account for the both materials properties and device physics of wide band gap transistors. Such new features include the diamond substrates for a better heat removal, adding a low conducting passivation between the gate and drain, using the perforated channel with perforations extending beyond the gate, implementing the HEMT technology in the AlInN/GaN materials system for lattice matching design and employing lateral-vertical designs for a higher breakdown voltage.
机译:氮化物高电子迁移率(HEMT器件)具有用于因为高击穿场的高功率和RF应用的巨大潜力,非常大的密度所引起的极化的二维电子,高电子速度和迁移率,优异的热性能,化学惰性和辐射硬度。生长在硅衬底上的GaN功率晶体管已经被商业化。然而,基于氮化物的HEMT的全部潜力还有待实现,并且将需要在该装置的设计改进该帐户的材料特性和宽的带隙的晶体管的器件物理两者。这种新功能包括一个较好的去除热的金刚石基材,添加低导电的栅极和漏极之间的钝化,使用具有延伸超过门穿孔穿孔信道,在实施HEMT技术在用于晶格匹配的设计AlInN组成/氮化镓材料系统和采用用于更高的击穿电压横向垂直的设计。

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