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The Formation and Gas Sensing Properties of ZnO 3D Branched Structures Based on InP Porous Structures

机译:基于INP多孔结构的ZnO 3D分支结构的形成与气体传感性能

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In the paper, ZnO 3D branched structures were synthesized by atom layer deposition (ALD) and hydrothermal method based on InP porous strucures, which were fabricated by electrochemical etching. The structural and optical properties of the samples were investigated, after electrochemical etching, the emission at 940nm can be observed, which was caused by porous structure. In addition, due to the growth of ZnO nanowires, the crystal and the optical properties can be also improved. The gas sensing activities of the ZnO 3D branched structures were investigated. Compared to ZnO nanowires, this 3D branched structures exhibited higher gas sensing activity.
机译:在本文中,通过基于INP多孔结构的原子层沉积(ALD)和水热法合成ZnO 3D支化结构,其通过电化学蚀刻制造。研究了样品的结构和光学性质,在电化学蚀刻之后,可以观察到940nm的发射,这是由多孔结构引起的。另外,由于ZnO纳米线的生长,还可以改善晶体和光学性质。研究了ZnO 3D分支结构的气体传感活动。与ZnO纳米线相比,该3D支化结构表现出更高的气体传感活动。

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