In consideration of increasing the MRR and improving the micro-structured surface quality, ultrasonic vibration assisted polishing (UVAP) of micro-structured surfaces on SiC is proposed in this paper. The experimental results shown that when compared with conventional polishing, the MRR can be improved from 34.67 nm·min~(-1) to 44.28 nm·min~(-1) in depth. Meanwhile, the polished surface roughness of microstructures is improved to 16.5nm (Ra) by a factor of 2 over the conventionally abrasive polished (AP) surface. In addition, there are no subsurface cracks can be found in the UVAP SiC micro-structures.
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