Design and Characterization of a MEMS Thermal Actuator and a Locking Switch for Telecommunication Applications

摘要

This paper describes the design and characterization of a novel thermal actuator and a locking switch using these actuators. In order to lower the current needed for the thermal actuation, a poly heater is implemented underneath the structural layer. When two thermal ac-tuators are positioned perpendicular to each other, a locking switch can be obtained. This locking mecha-nism saves energy as only electrical power is needed for closing or opening the switch. The switches were fab-ricated in the MetalMUMPs technology and the actua-tion showed good agreement withnite element results. They were able to lock into the closed state and showed a contact resistance of 0:35 . A reliability test was also performed, in which the resistance remained below 1:6 after 105 locking cycles. The locking switch could be used in telecommunication networks, in which it could be a key component in an automated MEMS-based dis-tribution frame.