Optimization of a carbon nanotubes manufacturing process by the technique of PECVD

摘要

Carbon nanotubes (CNT) are valuable for their application in nanotechnology, electrical properties and high surface area, and in our particular case, for the manufacture of nanosensors. In this work the technique of Plasma Enhanced Chemical Vapor Deposition (PECVD) was used for the manufacture of CNT. The process was conducted in a horizontal tube reactor using methane as precursor gas and an R.F. discharge of 1000w output power acting as ionizing medium. Having achieved the synthesis of CNT on copper (Cu) substrates, heated with an internal electrical resistance to a process temperature of 900 °C, the substrates were coated with ferric nitrate Fe(NO3)3, which served as a catalyst and nucleation center. The heating system used differs from traditional methods by its internal heating. Growth of CNT was achieved on vertical walls on Cu substrates and perpendicular to it;; a prerequisite for the manufacture of nanosensors, which is the main objective of this work, as well as to reduce as much as possible the diameter of the CNT, being its main features 5μm average length and 7 nm average diameter.