Titanium-doped Indium-Tin-Oxide Anti-Reflection Coating for Poly-Si Solar Cells

摘要

In this work, titanium-doped indium-tin-oxide (ITIO) films were deposited onto the glass substrates at room temperature by in-line RF magnetron sputtering. The deposition rate of the ITIO film increases with the RF power. The average transmittance of the deposited ITIO film is higher than 85% in the wavelength range of 350 - 950 nm. The resistivity of the sputtered ITIO has been reduced down to 7.03 × 10~(-4) Ω-cm. The poly-Si solar cell with ITIO film as the anti-reflection coating shows an efficiency improvement of 36.5% over that with AZO anti-reflection coating.